3D Ice Lithography
Approaching 3D printing at the molecular level
Two platforms. One technology. Scalable resolution.
ThorSEM
Thermionic SEM platform
FrejaFESEM
Field-emission SEM platform
| ThorSEM | System | FrejaFESEM |
|---|---|---|
|
Hitachi FlexSEM 1000 II (Thermal emitting) |
Platform |
Field-emitting with LLEE |
| < 0.6 x 0.6 x 0.6 µm³ | Voxel size | < 50 x 50 x 50 nm³ |
| 1 x 1 mm² | Writing field | 1 x 1 mm² |
| < 1000 nm/h | Print drift | < 30 nm/h |
| > 4 h | Printing time / LN2 fill | > 48 h |
| 20 nm to 2 µm ± 20% | Ice layer thickness | 20 nm to 2 µm ± 20% |
| Multimaterials GIS Hot GIS T-controlled Cryostage |
Options | Multimaterials GIS Hot GIS T-controlled Cryostage Interferometry stage |
