3D Ice Lithography

Approaching 3D printing at the molecular level

Two platforms. One technology. Scalable resolution.

Thermionic SEM platform

ThorSEM

FrejaFESEM

Field-emission SEM platform

  
      ThorSEM
      System
      FrejaFESEM
    
        Hitachi FlexSEM 1000 II

        (Thermal emitting)
      
        Platform
      
        Field-emitting

        with LLEE
      
      < 0.6 x 0.6 x 0.6 µm³
      Voxel size
      < 50 x 50 x 50 nm³
    
      1 x 1 mm²
      Writing field
      1 x 1 mm²
    
      < 1000 nm/h
      Print drift
      < 30 nm/h
    
      ∼ 4 h
      Max. print duration
      ∼ 48 h
    
      20 nm to 2 µm ± 20%
      Ice layer thickness
      20 nm to 2 µm ± 20%
    
      - Multimaterials GIS

          - Hot GIS

          - Low noise stage
      Options
      - Multimaterials GIS

          - Hot GIS

          - Low noise stage

          - Interferometry stage

Extend Your Capabilities. From Imaging to Fabrication.

Breathe new life into an existing SEM by expanding your current imaging platform to a 2-in-1 3D ice lithography system.

ThorUpgrade

&

Thermionic SEM platform

FrejaUpgrade

Field-emission SEM platform

✔ Accelerate technology adoption
- Integration in existing lab ecosystem

✔ Extend equipment lifetime
- Modular upgrade pathway

✔ Reduce capital expenditure
- Avoid full system replacement

✔ Sustainable Innovation
- Repurpose. Upgrade. Fabricate.